光刻的最细线宽对所加工的二元微器件性能起决定作用。
The smallest linewidth produced by laser lithography plays an important role in the properties of the micro-optical elements.
光刻的最细线宽对所加工的二元微器件性能起决定作用。
The smallest linewidth produced by laser lithography plays an important role in the properties of the micro-optical elements.
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