本文介绍了一种用于高精度测量图案棱边直线性的装置。
An Equipment for high precision measurement of pattern edge linearity is described in this paper.
本发明的一种用线性真空计测量真空容器容积比的装置及方法，属于测量技术领域。
The invention discloses a device and a method for measuring a volume ratio of a vacuum container by a linear vacuometer, and belongs to the technical field of measurement.
文章综述了测量非线性光学(nlo)聚合物薄膜材料光波导传输损耗的三种新方法及原理，分别给出了典型的实验装置结构图，并对它们的特点进行了比较。
The principles of the common methods to measurement the propagation loss of the NLO polymer film optical waveguide are summarized, and the typical experimental arrangements are presented.
高度数据的激光测量装置也采用线性最小二乘法和倾斜角度是从梯度的线性拟合数据。
The height data of laser measurement were also linear fitted using the least-squares method and tilt Angle was obtained from the gradient of the linear fitted data.
高度数据的激光测量装置也采用线性最小二乘法和倾斜角度是从梯度的线性拟合数据。
The height data of laser measurement were also linear fitted using the least-squares method and tilt Angle was obtained from the gradient of the linear fitted data.
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