针对扫描探针显微镜的压电扫描器提出一种非线性校正方法。

A calibration method for the non-linearity of the Scanning Probe Microscope (SPM) "s PZT scanner was described."

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针对扫描探针显微镜的压电扫描器提出一种非线性校正方法。

A calibration method for the non-linearity of the Scanning Probe Microscope (SPM) "s PZT scanner was described."

youdao