并对系统的频率特性进行了分析，表明基于该技术的微加速度计系统在工作频段内噪声能够得到有效的消除，且具有近似的线性相位。
The analyses of frequency characteristic of the system demonstrate that the noise in effective frequency band is eliminated and the phase of the system is approximately linear.
线性测试结果表明该复合量程微加速度计具有较好的线性度，因而可以同时在测量四个不同的量程的加速度值。
Finally, the testing demonstrates that such a multi-ranged sensor has a good linearity, thus it can be used to measure four accelerations within four individual ranges.
为提高灵敏度和线性，该加速度计采用静电力反馈闭环控制方式，检测与处理电路采用高精度双极线性电路工艺进行了工艺流片。
To improve sensitivity and linearity, feedback loop was adopted with electrostatic in detection and managing circuit, which is fabricated with high precision bipolar linear circuit technology.
该加速度计根据差分电容极板间正对面积的改变来检测加速度大小，保证了输出电压与加速度之间的线性度。
The acceleration is measured by modifying the effective overlap area of a differential capacitor pair and the linearity between output voltage and acceleration is ensured.
通过测试，加速度计的非线性达到0.2%。
Through testing, non-linearity of the accelerometer is 0.2%.
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
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