结果表明：薄膜由非晶硅结构转变为微晶硅结构，微晶硅晶粒尺寸在纳米级。
The results indicate that the amorphous film gradually transfers into microcrystalline Si, and the grain size is nanometer order of magnitude.
本发明公开了一个使包括氢化非晶硅和氢化纳米晶硅的氢化硅薄膜具有真正本征性的方法。
The present invention discloses a method for making the hydrogenated si containing hydrogenated amorphous silicon and hydrogenated nanocrystalline silicon has real intrinsic capability.
本文研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理，提出了减少游离硅的措施，利用双光束激发制备了超微的、非晶纳米氮化硅粉体。
It is used in many areas. In this paper, the general principles of LICVD (laser induced chemical vapor deposition) were investigated and the measures to reduce dissociated si were put forward.
本文研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理，提出了减少游离硅的措施，利用双光束激发制备了超微的、非晶纳米氮化硅粉体。
It is used in many areas. In this paper, the general principles of LICVD (laser induced chemical vapor deposition) were investigated and the measures to reduce dissociated si were put forward.
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