提出一种新型的五自由度精密定位平台的工作原理及其设计方法。
This paper presents a new type of nanopositioning stage which has five degree of freedom;
建立了一在固定运动范围内具有高精度定位能力的精密定位平台，分析了平台参数的确定方法。
A precision positioning stage is designed in this paper, which can achieve high degree of accuracy in fixed movement range.
针对一类音圈电机直接驱动的二自由度高速精密定位平台，为了在高速高加速情况下，获得良好的动态特性，对其动力学控制方法进行研究。
To improve the precision and efficiency of the integrated circuit (IC) package, a 2-dof high speed and high precision XY positioning table driven by voice coil actuator is presented.
该平台将电动机放置在基座上，使运动惯量大大减小，从而使实现定位平台的高速高精密运动成为可能。
The motors are placed on the base, so that the small moving mass makes it possible that the positioning table moves at high speed and precision.
该平台将电动机放置在基座上，使运动惯量大大减小，从而使实现定位平台的高速高精密运动成为可能。
The motors are placed on the base, so that the small moving mass makes it possible that the positioning table moves at high speed and precision.
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