通过对化学镀铜膜形貌和结晶方面的研究发现：籽晶层对铜膜最终形貌和择优取向有较大的影响。
Through the study, we find that the morphology and crystallography of the seed layer has an important effect on the as-deposited Cu films.
通过对化学镀铜膜形貌和结晶方面的研究发现：籽晶层对铜膜最终形貌和择优取向有较大的影响。
Through the study, we find that the morphology and crystallography of the seed layer has an important effect on the as-deposited Cu films.
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