本文综述了ECR放电的基本物理过程和实验研究概况，介绍了ECR等离子体在表面处理、镀膜和离子源等方面应用的最新结果。
This article reviews the basic physics of ECR discharge and experimental research, and describes new applications of ECR plasma in surface processing, plasma coating and ion source.
为加热HT-6M托卡马克等离子体而研制的IS-A十厘米双潘宁离子源具有强流、大功率、高质子比等特点。
IS-A type 10cm duopigatron ion source that was made for heating plasma In the HT-6M Tokamak has high current, high power and high proton composition.
为加热HT-6M托卡马克等离子体而研制的IS-A十厘米双潘宁离子源具有强流、大功率、高质子比等特点。
IS-A type 10cm duopigatron ion source that was made for heating plasma In the HT-6M Tokamak has high current, high power and high proton composition.
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