等离子体源离子注入技术是一种新型的非视线的离子注入材料表面改性技术。
Plasma source ion implantation is a new non-line of sight ion implantation technique for surface modification of materials.
建立了等离子体基离子注入过程中试样温度预测的理论模型，应用这个模型进行了一系列数学模拟。
A theoretic model for prediction of sample temperature during plasma based ion implantation was established, and computer simulation was done with the model.
等离子体源离子注入装置由脉冲负高压源系统、热阴极弧放电系统、真空室及样品台、真空系统和监测系统等五部分组成。
The plasma source ion implantation device consists of pulsed negative high voltage power, hot cathode arc discharge system, vacuum chamber and target stage, vacuum system and monitor system.
本文采用微波等离子体cvd法制备定向生长的金刚石薄膜。用冷离子注入法对金刚石薄膜进行硼掺杂。
The diamond films were fabricated by microwave plasma CVD and the boron-doped was created by the cold ion implantation.
用等离子体浸没离子注入与沉积（PIIID）复合强化新技术在AISI52100轴承钢基体表面成功合成了硬而耐磨的氮化钛薄膜。
Titanium nitride(TiN) hard protective films were fabricated on AISI52100 bearing steel surface employing plasma immersion ion implantation and deposition(PIIID) technique.
采用等离子体源离子注入方法，将氮离子注入纯铁粉中，对样品进行穆斯堡尔谱研究。
Mssbauer measurements have been carried out for pure iron powder samples, the whose surface was implanted with nitrogen ions by plasma source ion implantation techniques.
这一分析方法对实际等离子体源离子注入应用具有重要的指导作用。
This method would be very helpful to the design of practical plasma source ion implantation processes.
本文叙述了辉光放电等离子体源的等离子体源离子注入。
In this paper, a glow discharge plasma source ion implantation technique is described.
采用等离子体浸没式离子注入对45钢进行氮离子注入。对注入表层的成分、组织和性能进行了分析。
A new plasma immersion ion implantation (PIII) technique was employed for implanting nitrogen ions in steel 45. The composition, microstructure and property of the implanted layer were analyzed.
这些纳米粒子呈现的等离子体激元震荡导致玻璃的非线性光学性质增强，因此离子注入的玻璃可以应用于全光学开关器件。
These nanoparticles exhibit plasmon resonance, which enhance the nonlinear optical properties of the glass, so that the implanted glass may be used for all_optical switching devices.
氦离子用等离子体浸没离子注入技术注入硅片中。
Helium ion was implanted by plasma immersion ion implantation technology.
提出等离子体浸没离子注入可以作为一种经济、有效的诱变育种方法。
Being an economical and available method plasma immersion ion implantation in mutagenic breeding is proposed.
采用等离子体基低能离子注入装置在不同注入温度、气压条件下氮离子注入316奥氏体不锈钢。
The surface modification of 316 austenitic stainless steel has been investigated by plasma-based low-energy ion implantation apparatus at various temperatures and working atmospheric pressure.
本发明涉及离子注入机imp，包括脉冲等离子体源spl、衬底支承台PPS和所述台的电源alt。
The invention relates to an ion implanter (imp) comprising a pulsed plasma source (SPL), a substrate support plate (PPS) and a power supply (ALT) for said plate.
目前主要采用化学气相沉积法、离子束溅射法、激光等离子体沉积和激光烧蚀、离子镀、离子注入法等制备方法。
Its structure and character were reviewed, and the synthetic methods, including CVD, ion beam sputtering, laser ablation, ion plating and ion irradiation et al., were completely introduced.
球经高频低压等离子体浸没离子注入及氮化处理后，样品表面的硬度、耐磨性和耐腐蚀性显著提高，具有较好的均匀性。
The hardness, wear resistance and corrosion resistance of the ball were significantly increased after the treatment of HLPIII, and had better uniformity.
球经高频低压等离子体浸没离子注入及氮化处理后，样品表面的硬度、耐磨性和耐腐蚀性显著提高，具有较好的均匀性。
The hardness, wear resistance and corrosion resistance of the ball were significantly increased after the treatment of HLPIII, and had better uniformity.
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