第三章给出了等截面悬臂梁微开关的微机械加工工艺，设计了掩膜版及具体的工艺参数。
Chapter three: Presents the fabrication process of micro-switch with cantilever beam and designed the masks.
在研究了等截面悬臂梁结构纳机电探针之后，本文还研究了在悬臂梁自由端集成了加热电阻的V型和U型悬臂梁维构纳机电探针。
Besides rectangular shaped cantilevers with both piezoresistive sensor and electric heater, the "V" and "U" type cantilevers are also formed for electric-heating probes.
在研究了等截面悬臂梁结构纳机电探针之后，本文还研究了在悬臂梁自由端集成了加热电阻的V型和U型悬臂梁维构纳机电探针。
Besides rectangular shaped cantilevers with both piezoresistive sensor and electric heater, the "V" and "U" type cantilevers are also formed for electric-heating probes.
应用推荐