其中原子水平迁移是薄膜热弛豫的主要途径，入射原子的注入和迁移行为相互竞争，决定了薄膜生长的模式和最终结构。
The transverse migration of the atoms is the main route of film relaxation. The competition between atomic implantation and migration determines the growth mode and final structures of the film.
其中原子水平迁移是薄膜热弛豫的主要途径，入射原子的注入和迁移行为相互竞争，决定了薄膜生长的模式和最终结构。
The transverse migration of the atoms is the main route of film relaxation. The competition between atomic implantation and migration determines the growth mode and final structures of the film.
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