• 本文研究离子注入红外辐照退火后的热处理特性。

    In this paper, thermal post-treatment for infrared rapid isothermal annealed boron-implanted silicon was studied.

    youdao

  • 本文研究离子注入红外辐照退火后的热处理特性。

    In this paper, thermal post-treatment for infrared rapid isothermal annealed boron-implanted silicon was studied.

    youdao

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