评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。
It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.
本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。
The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
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