本文研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理，提出了减少游离硅的措施，利用双光束激发制备了超微的、非晶纳米氮化硅粉体。
It is used in many areas. In this paper, the general principles of LICVD (laser induced chemical vapor deposition) were investigated and the measures to reduce dissociated si were put forward.
目前，硅粉直接氮化法是制备氮化硅应用最普遍的方法。
There are two methods for synthesis of the fluoroporphyrins: direct and indirect fluorination.
目前，硅粉直接氮化法是制备氮化硅应用最普遍的方法。
There are two methods for synthesis of the fluoroporphyrins: direct and indirect fluorination.
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