简要介绍硬质合金、压电陶瓷和单晶硅的加工特点及利用超声微细加工这三种材料的优势。
The paper introduces simply the characteristics of three experimental materials used to process micro-structures, single-crystal silicon, piezoelectricity ceramic and cemented carbides.
从硅材料的物理性能出发，分析其微细电火花加工的可行性。
This paper analyses the micro EDM feasibility for semiconductor silicon from the physical properties of silicon.
微细切削技术是面向金属与合金等非硅材料微小型结构件精密加工需求的关键技术。
Micro-cutting technology is the key technology for the precision machining of microstructure which is usually made of non-silicon materials such as metal and alloy.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
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