多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。

Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.

youdao

多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。

Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.

youdao