介绍了一种由非硅微加工技术制作的电热微驱动器。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。
The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
其结果对进一步开展这方面的研究工作具有指导意义，在进一步深入开展研究电化学体硅微加工技术时，可有望成为实现硅深孔列阵加工的新技术。
The consequences are benefit to Silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about Silicon deep-holes etching technology.
介绍了一种基于硅体加工技术以及阳极键合技术的微热管阵列。
This paper investigates one kind of micro heat pipe arrays (MHPA), which are fabricated by advanced silicon bulk micromachining and anodic bonding technology.
本硕士论文对基于非硅基微加工技术的光开关及可调光衰减器的设计制作与分析进行了研究。
This thesis presents a study on the non-silicon based MEMS optical switch and variable optical attenuator.
本硕士论文对基于非硅基微加工技术的光开关及可调光衰减器的设计制作与分析进行了研究。
This thesis presents a study on the non-silicon based MEMS optical switch and variable optical attenuator.
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