为了提高电池活跃区域的光的光学局限，特别研发了多孔硅反射镜。
To improve the optical confinement of light in the active part of the cell, a buried porous Si reflector is developed.
目前大多数激光器是用硅来做反射镜，来来回回地反射激光X射线，但硅反射镜不能反射功率大的X射线。
Most lasers use silicon mirrors to bounce light wavelengths back and forth, but silicon can't reflect powerful X-rays.
基于MEMS技术体硅工艺，提出一种新型大有效面积的连续变形反射镜的设计制造方法。
A method for designing and fabricating a novel deformable mirror with large effective area is proposed on the basis of MEMS technology.
给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。
The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
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