介绍了工业变送器用75系列扩散硅压力传感器。
This paper introduces the series 75 diffused-silicon sensors applied in the industrial transmitter.
大片玻璃打孔机是一台硅压力传感器的生产设备。
The drilling machine for large glass wafer processing is a production machine for silicon pressure sensors.
根据扩散硅压力传感器灵敏度温漂产生的原理，分析了灵敏度与温度的关系。
The sensibility correlation with temperature has been analyzed on the base of the principle of creating sensitivity temperature shifting in piezoresistive pressure sensors.
介绍在IBM及其兼容系列微型机上，实现硅压力传感器版图CAD软件的设计方法。
The paper describes that a silicon pressure sensor with plate graph CAD software design is carried out on IBM and its series of compatible microcomputers.
介绍了硅压力传感器的作用及原理，并详尽讨论了在低抗干扰方面的设计思想与方法。
Function and working principle of pressure transducer in silicon have been introduced. And gave the detail discussion design ideas and method in disturbance.
本文介绍了工业压力变送器用全固态结构的SG- 75扩散硅压力传感器的研制。
This paper presents the SG-75 Type solid state silicon pressure sensors applied in industrial pressure transmitters.
本文介绍了在工业变送器用扩散硅压力传感器的工程化研究中，为提高其质量而采取的几项技术措施。
This paper introduces a few key technological measures for increasing the quality of the diffused-silicon sensors applied in the industrial transducer in its industrializing research.
研究了利用压力位移气动传感方法和以扩散硅压力传感器组成测试系统对发动机喷油嘴偶件进行检测。
A measuring system is studied to test coupled pair in oil nozzle of engines by means of the pneumatic sensing method and the diffused silicon pressure sensor.
它的外壳由硅材料制成并安装了压力传感器，以便识别碰触到的物体。
Its outer casing is made of silicone and is fitted with pressure sensors so that it knows what it is touching.
此芯片集成化程度较高，可以补偿硅压阻式压力传感器的温度误差和非线性误差。
It is mainly used to compensate temperature shift and non-linearity error of piezoresistive pressure sensor.
本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。
The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions.
硅压阻式传感器是一种新型压力传感器，它具有体积小，频响高等优点。
Silicon piezoresistance transducer is a new type pressure sensor which has smaller size, higher frequency response and other advantages.
介绍了一种用压力一温度复合传感器对硅压阻式压力传感器温度特性的补偿方法。
A compensate method of piezoresistive pressure sensor temperature characteristic is introduced by using a pressure - temperature complex sensor.
本文报道了一种硅盒结构的、具有频率输出的集成MOS环振式压力传感器。
An. integrated MOS ring oscillator pressure sensor with silicon box structure, having frequency as output is reported.
评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。
It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.
根据模拟结果并结合单晶硅材料和SOI结构的特点，设计出了矩形应力膜单晶硅soi高温压力传感器芯片。
According to the result of simulation and characteristic of monocrystalline silicon SOI structure, a novel high temperature SOI pressure sensor with a rectangle diaphragm was designed.
列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法，并分别讨论了它们的原理及特点。
Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced, whose principles and characteristics are discussed.
针对偏瘫病患者身体接触面间的压力分布检测，提出并研发了一种基于压阻效应的新型非硅薄膜网格压力传感器。
A new type of non-silicon thin film grid pressure sensor was brought forward and devised to detect and measure the pressure distribution between the bodies s touching surfaces of hemiplegics patient.
从应用开发MEMS产品的实用角度出发，介绍了利用硅一硅键合技术制作的微型电容式压力传感器，给出了详细的制作工艺及主要工艺步骤图。
Introduced the capacitive pressure microsensor produced by Si-Si bonding technology in terms of the practicality of MEMS products. The producing technology and major diagrams were given in detail.
单晶硅soi高温压力传感器是一种新型高性能高温压力传感器。
High temperature SOI Monocrystal silicon pressure sensor is a new type high temperature pressure sensor with high performances.
介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性，论述了在单晶硅和多晶硅高温压力传感器的制作过程中，TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。
Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
在金属圈内滴封包封胶，填充在硅压阻式压力传感器的四周，隔 绝传感器芯片与外界环境的接触。
Sealing gel is dripped into the metal ring and filled around the silicon piezoresistive pressure sensor, so as to isolate the chip of the sensor from the outside environment.
介绍一种以多晶硅薄膜为敏感材料的压力传感器。
A polysilicon thin film pressure sensor is presented. It utilizes polysilicon thin film as stress sensitive material.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
根据模拟结果，设计了波纹膜片和硅敏感膜片，并用于压力传感器生产中。
According to simulation results, the corrugated diaphragm and silicon-sensitive diaphragm is designed, which is used in production.
采用了基于MEMS技术的硅压阻式压力传感器SP12作为轮胎压力的检测单元，PIC16F628A作为信号控制处理与发射单元。
A silicon piezoresistive pressure sensor based on MEMS technology SP12 is applied to be a unit in the tire pressure monitoring.
采用了基于MEMS技术的硅压阻式压力传感器SP12作为轮胎压力的检测单元，PIC16F628A作为信号控制处理与发射单元。
A silicon piezoresistive pressure sensor based on MEMS technology SP12 is applied to be a unit in the tire pressure monitoring.
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