真空处理装置包括该基板搬运装置。
The vacuum treating apparatus is provided with the substrate transfer device.
它主要是由锅炉加热装置，真空处理装置，液滤池及水环系统组成。
It mainly consists of boiler heating equipment, vacuum treatment equipment, filter chamber and water circulation system.
它主要是由锅炉加热装置，真空处理装置，液滤池及水环系统组成。
It mainly consists of boiler heating equipment, vacuum treatment equipment, filter chamber and water circulation system.
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