阐述了真空微电子压力传感器阵列的工作原理和工作波形。
The working principle and working wave shape of the vacuum micro electronic pressure sensor is described.
提出了一种带过载保护功能的真空微电子压力传感器。
A vacuum micro-electronics pressure sensor with the function of overloading protection is brought forward.
研究了真空微电子压力传感器的力学和电学特性、传感器结构及相应的计算与模拟。
The mechanical property and electricity property of the vacuum micro electronic pressure sensor is studied and relevant computation and simulation are carried out.
提出和完成了自保护功能的真空微电子压力传感器的结构设计。
The design of overload protection is put forward in the vacuum micro electronic pressure senor.
光束线真空联锁保护系统主要由快阀、门阀、压力传感器(真空规)和控制系统等组成。
A beam-line vacuum interlock protecting system consists of fast-closing valve, gate valves, sensors and control system.
探头伸缩杆一端安有超声波传感器、流速测定仪、压力传感器和真空活塞水样采集器。
One end of a probe telescopic rod is provided with an ultrasonic sensor, a flow velocity determinator, a pressure sensor and a vacuum piston water sample collector.
探头伸缩杆一端安有超声波传感器、流速测定仪、压力传感器和真空活塞水样采集器。
One end of a probe telescopic rod is provided with an ultrasonic sensor, a flow velocity determinator, a pressure sensor and a vacuum piston water sample collector.
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