采用低压驱动电路驱动压电陶瓷相移器对参考光束进行相移，从而使仪器质量减轻、体积缩小、成本降低。
The low-voltage driving circuit is adopted to drive a piezoelectric ceramic phase shifter to shift the phase of the reference beam, so as to make the instrument lighter, smaller and cheaper.
锁相环电路，相移方法，及集成电路芯片。
Phase-locking loop circuit, phase shifting method, and IC chip.
最后将错位相移器应用于集成电路硅片薄膜应力分布测试仪及错位电子散斑干涉仪之中。
This technic has been used in the instrument of IC wafer Stress Analyzer and Shear Electronic Speckle Pattern Interferometry (SESPI).
最后将错位相移器应用于集成电路硅片薄膜应力分布测试仪及错位电子散斑干涉仪之中。
This technic has been used in the instrument of IC wafer Stress Analyzer and Shear Electronic Speckle Pattern Interferometry (SESPI).
应用推荐