此方法已成功地应用于自行研制的衍射光学元件三维表面形貌测量系统中。
The method has been successfully used in the system for measuring the 3-d surface topography of diffractive optical elements.
通过灰度掩模平面不同位置处提供可变的透过率，经一次光刻后得到所需的衍射光学元件。
A variable transmittance is provided to different position on grayscale mask plane and the required diffractive optical elements can be obtained after one-time exposure.
以几何理论为基础来设计将激光束整形为正方框形光束的衍射光学元件（DOE），推导出了衍射光学元件表面上的相位表达式；
Based on geometric theory, diffractive optical element s applied to shape laser beams is designed, the phase expression of the diffractive optical elements is deduced.
本文介绍了二元光学元件的概况，衍射透镜理论，二元光学元件的制造方法以及发展趋势。
The introduction of binary optical elements, theory of diffractive lenses, fabrication of binary optical elements and trends are related.
本文使用衍射光学元件来提高激光束的焦深。
Focal depth of laser beam is advanced by diffraction optical element in this paper.
用电子束逐行扫描方法刻蚀衍射光学元件的浮雕结构精度高而速度低。
The relief structure of diffraction optical element can be written precisely but very slowly with the raster scan mode bye-beam.
轴棱锥是产生无衍射光束的最有效光学元件之一。
Axicon is one of the most efficient elements to generate Non-diffraction beams.
根据菲涅耳衍射理论，采用微光学元件制作技术，通过三次套刻制作出八位相台阶的二元离轴菲涅耳透镜。
A binary Fresnel lens with 8 phase steps can be manufactured with micro-optical element fabricating technology and three times of alignment according to Fresnel diffraction theory.
本文介绍一种以液晶空间光调制器作为调制位相信息的衍射元件，获得可变焦长的菲涅耳透镜，以及该元件在光学成像系统中的应用。
A kind of diffraction element modulating phase information by LC space light modulator to get a zoom Fresnel lens, as well as the using of said element to optical imaging system, is introduced.
介绍了将设计衍射光学元件的方法用于设计低旁瓣毫米波衍射天线的基本设计思想、设计结果和应用前景。
The basic idea, the result and the application prospects of the design of sidelobe depressed dielectric diffraction antenna using the diffraction optics elements designing method were introduced.
该工艺具有良好的可控性，解决了在厚基片上制作大口径衍射光学元件时残余光刻胶的去除问题。
The process was controllable and could be applied to strip the photoresist residual of diffractive optical element fabricated on the thick substrate.
为了提高激光直写加工衍射光学元件时的线条质量，提出一种离焦激光直写的线宽稳定方法。
A linewidth stabilizing method for defocusing laser direct writing is proposed for further improvement of line quality of diffractive optical elements.
提出加权串行迭代(WSI)算法用于解决衍射光学元件(DOE)的设计问题。
We have brought forward the weighted serial iterative (WSI) algorithm which is employed to resolve the design of diffractive optical elements (DOE).
介绍了当前光纤组束研究中的几种主流方法，即利用受激布里渊散射的光纤组束；利用衍射光学元件的光纤组束；全光纤组束等。
Several mainstream laser beam combination methods, including stimulated Brillouin scattering, diffraction optics units and all fiber beam combination, are introduced.
激光直写机是制作衍射光学元件的关键设备，离焦检测技术是其中的重要单元技术之一。
Laser direct writing system is the key equipment for fabrication of optical diffractive elements, and the defocus detection technique is the important sub-tech in it.
本文主要介绍了衍射光学元件在激光系统、光学互连、波前探测、目镜设计和扫描系统上的应用，以及目前技术上的热点。
The application of diffractive optical elements in laser systems, optical interconnects, wave-front sensing, eyepiece design and scanning systems. Current highlights are also discussed.
在入射光束的孔径受限制的情况下，利用衍射光学元件来增加激光束的焦深。
Placing a diffractive optical element(DOE) on the incident laser beam to improve the depth of focus, the DOE'S aperture is variable.
衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。
DOE's fabrication techniques mainly include laser beam or electron beam writing, RIE, ion milling and thin film deposition.
最后，对全息透镜和折射透镜的色散特性进行了比较，得到衍射光学元件的等效色散系数。
Finally, the chromatic dispersive characteristics of holographic lens and refractive lens are compared, and the effective chromatic coefficient of holographic lens is given.
文中给出了几个实例，充分表明这是有实用价值的一种衍射光学元件设计方法。
Several examples shown in this Paper indicate that it is a valuable design method of the diffraction optical element.
最后，观察该二元光学元件的衍射花样图形并讨论其衍射特性。
Finally, the diffraction patterns of micro structure were observed to examine the features of binary DOE.
采用衍射光学元件除了能减小成像系统的体积和重量外 ，还具有许多传统光学元件无法比拟的优越性 ，如消色差和热补偿功能等。
The diffractive optical elements(DOEs) used in imaging systems has many advantages, such as achromatization and thermal compensation besides the features of saving in mass and volume.
在大多数文献中，主要用它来设计一维衍射光学元件和具有旋转对称结构的二维衍射光学元件，故在此称之为一维杨顾算法。
In almost all literatures, it is mainly used to compute one-dimensional diffractive optical elements and two-dimensional diffractive optical elements with rotationally symmetric structures.
摘要 ：总结了大尺寸衍射光学元件离子束刻蚀技术的研究进展。
Abstract : Ion beam etching technologies for developing large aperture Diffractive Optical Elements (DOEs) were reviewed.
衍射光学元件(DOE)表面形貌的测量需要解决因表面结构深度较大和表面不连续给测量带来的困难。
The surfaces of diffraction optical element (DOE) are often deep and discontinuous, which lead to some difficulties for measurement of the 3-d surface topography of DOE.
衍射光学元件(DOE)表面形貌的测量需要解决因表面结构深度较大和表面不连续给测量带来的困难。
The surfaces of diffraction optical element (DOE) are often deep and discontinuous, which lead to some difficulties for measurement of the 3-d surface topography of DOE.
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