针对成型电极在微细加工中暴露出的缺点,提出了利用旋转微细电极像微铣刀一样进行微细电解铣削新工艺,加工出高精度型孔和悬臂梁等微结构。
The new process of electrochemical milling by rotating microelectrode like micro milling-(cutter) was proposed, and micro profiled hole and micro beam with high precision can be milled.
针对成型电极在微细加工中暴露出的缺点,提出了利用旋转微细电极像微铣刀一样进行微细电解铣削新工艺,加工出高精度型孔和悬臂梁等微结构。
The new process of electrochemical milling by rotating microelectrode like micro milling-(cutter) was proposed, and micro profiled hole and micro beam with high precision can be milled.
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