多孔硅微腔是采用交替变化脉冲腐蚀电流密度的方法制成的多孔度周期性变化的多孔硅结构。
Porous silicon microcavities were etched with alternate varied current density which made the porosity change periodically.
多孔硅微腔是采用交替变化脉冲腐蚀电流密度的方法制成的多孔度周期性变化的多孔硅结构。
Porous silicon microcavities were etched with alternate varied current density which made the porosity change periodically.
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