详细介绍了高精度差动电容位移传感器，并研究了仪器的抗干扰措施。
The high accuracy differential capacity displacement sensor is introduced in detail. Meanwhile the antijamming measure is studied.
本文提出了一种基于数字调制和解调技术的电容式位移传感器的设计方法。
This paper presents a design method of capacitance displacement sensor based on digital synthesis technology.
提出了一种可同时测量位移和角度的变面积式差动电容传感器的设计方案。
An area-alterable differential capacitive sensor is discussed, which can measure both displacement and angle.
德国米铱公司提供的电容式位移传感器被用于以纳米级的精度校准芯片光刻机中镜片的位置，测量晶圆厚度等应用。
Capacitive sensors from Micro-Epsilon are used, among other things, for the positioning, displacement measurement and thickness measurement in the semiconductors area.
介绍了二维垂直摆倾斜仪的结构及工作原理，电容式微位移传感器的组成及工作原理。
The structure and principle of a two-dimensional vertical pendulum tilt meter and a capacitance mini-displacement sensor are introduced.
为了校准位移因子，需通过电容传感器和干涉仪同时记录中间极板的实际位移值。
To calibrate the DSF, the physical displacement of the center plate is simultaneously recorded by the transducer and interferometer.
该文利用有限元法对电容式角位移传感器三维电场进行分析，仿真研究不同结构参数的敏感元件，所得结论与实验结果吻合。
Electric field of capacitive angular sensor are analyzed by finite element methodology. Sensors with different dimensions are studied by simulation. The result is proved by the experiment.
介绍一种电容式角位移测量系统，它以电容传感器作为敏感元件，以89c51单片微机为控制核心。
A capacitive angular-position detective system is introduced. It takes the capacitive sensor as the sensing component, and the 89c51 single chip processor as the core.
测量系统由电容式角位移传感器和电子数显部件组成。
Measuring system is made up of angular position pick up and electronic digital display.
本文基于原子力微探针瞄准原理并结合二维微位移系统和高精度电容传感器，研制了微尺寸测量系统。
On the basis of the aiming principle of the atomic force probe a-long with 2D micro-displacement system and the high precision capacitive sensors , the micro-dimension measurement system is developed.
另外厚膜电容式压力传感器还有一种重要的应用，它可以用来对位移进行测量，例如对压电陶瓷PZT的精密位移测量。
There is also an important application that can be used to measure displacement, for instance, PZT piezoelectric ceramic precision displacement measurement.
另外厚膜电容式压力传感器还有一种重要的应用，它可以用来对位移进行测量，例如对压电陶瓷PZT的精密位移测量。
There is also an important application that can be used to measure displacement, for instance, PZT piezoelectric ceramic precision displacement measurement.
应用推荐