对电容式加速度计，为测量其电容的变化，通常需要带直流偏置的交流电压信号来驱动。
For capacitive sensing, driving signal with DC bias voltage and ac voltage is usually necessary for the measurement of capacitance.
介绍了一种新型基于滑膜阻尼的电容式微机械加速度计。
A novel micromachined capacitive accelerometer, based on slide-film damping principle, was reported.
本文介绍了一种电容式微机械加速度计的数字化处理电路，并重点介绍了数模转换器和模数转换器的温度特性。
A digital processing system based on a capacitive MEMS accelerometer is introduced, the analysis is concentrated on the temperature characteristic of DA and AD.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
提出一种带有杠杆机构的电容检测微型加速度计。
The paper puts forward a new type of micro-accelerometer with lever mechanisms which uses capacitance detection.
根据设计的单轴电容式微加速计分析了微加速计的建模方法以及加速度计性能指标与设计参数之间的数学关系。
According the designed single axis micro accelerometer, its modeling means is presented. The relations between its design parameters and its performance index are analyzed.
该加速度计根据差分电容极板间正对面积的改变来检测加速度大小，保证了输出电压与加速度之间的线性度。
The acceleration is measured by modifying the effective overlap area of a differential capacitor pair and the linearity between output voltage and acceleration is ensured.
本文首先分析了电容式闭环加速度计检测电路的原理，给出了低功耗的检测电路架构。
Firstly, a low power sensing circuit system is proposed by analysing closed-loop accelerometer sensing principle.
电容式微加速度计的噪声包括机械热噪声和电热噪声；
The noise of capacitive micro accelerometer include mechanical thermal noise and electrical thermal noise;
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
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