本文介绍一种新型的光学薄膜制备用多离子束电子束系统。
This paper describes a new multi ion and electron beam system for preparing optic thin films.
本文介绍的长脉冲大面积强流电子束系统是为横向泵浦和控制放电泵浦大能量气体激光而设计和研制的。
The long pulse electron beam system reported here was constructed for transverse pumping and e-beam sustained discharge large energy gas laser.
为了实现了高精度电子束焊缝连续自动检测，开发了针对环形工件的智能超声自动化检测系统。
For the continuous and automatic testing with high precision, we designed an ultrasonic automatic test system for annular work-pieces.
这些结果为超短脉冲在桌面系统上放大以及进一步采用电子束泵浦的准分子激光器放大奠定了一定的基础。
These results establish the base of amplifying the pulse laser in the desk system and further in the excimer laser amplifier pumped by the electron beams.
在电子束及粒子束器件中，发射系统直接影响整个器件的质量。
In the electron beam and ion beam device, the emission system affects the quality of the whole device.
电子冷却系统中冷却力的大小与电子束的温度密切相关。
Cooling force in electron cooling system is closely related to the temperature of electron beam.
叙述了一种用于局部真空电子束圆形焊缝的自动跟踪系统的设计和试验过程。
The design and experimental process of an automatic tracking system applied to local vacuum electron beam welding are dealt with in this paper.
本文介绍了上海电子束离子阱(EBIT)装置微量气体注入系统的成功研制。
The gas injection system for Shanghai electron beam ion trap (EBIT) facility is successfully developed.
正在研制的激光定位吊装结构工作台系统是电子束曝光机的主要组成部分。
The laser Positioning stage system with hoisting structure which is being developed is the main part of the Electron - beam Lithography Machine.
作者在研制激光数字点阵全息图的基础上，尝试使用电子束刻蚀系统制作数字像元全息图以期用于防伪和保密模压全息图的制作。
Trial fabrication of digital pixel hologram which are recorded by an electronic beam lithography system to apply to fabrication of embossing hologram for anti counterfeiting and security is described.
本文总结了用于可变矩形电子束曝光机激光定位工件台电控系统的研制及实验经验。
The development and experiments of electronic controlling system for variable rectangular E-beam lithography and lasser positioning stage are summed in the paper.
介绍了图形发生器的作用及电子束在控制系统作用下在基片上描绘图形的过程。
The principles and features of raster scan, the function of the pattern generator and the process of the electron beam writing on the substrate under the control system are also introduced.
该系统集脉冲阴极弧离子镀、直流阴极弧离子镀、磁控溅射和电子束蒸发等镀膜工艺以及气体和金属离子注入于一体。
The system include pulse cathodic arc ion deposition, direct current cathodic arc ion deposition, magnetic sputtering and electronic beam evaporation technologies.
结合电子束单晶熔炉对控制系统的要求，分别对控制软件的作用和构成进行了详细的说明。
According to requirement of control system in electron beam single crystal furnace, hardware composition and software functions of the control system are described in detail.
张力调节装置是电子束辐照交联电线电缆生产线传输系统实现速度同步的关键部件。
The tension adjuster is an important equipment in the transport system at the work line of electron beam radiation cross-linking wire and cable to realize the velocity synchronism.
在20kw电子束炉改造中，重新设计了基于P LC和组态软件的控制系统，本文介绍了该系统的设计方法。
The method of designing the control system based on PLC and configuration in the reconstruction of 20 KW electron beam furnace is described in this paper .
同时，将超声成像和声图像处理技术应用到本系统中，实现了环形电子束焊缝超声检测的自动化。
To realize this automatic test system, not only the newly developed automation technology and ultrasonic signal processing technique, but also the ultrasonic image processing technique was applicated.
应用自制柔性化电子束钎焊系统对毛细管板接头的钎焊工艺进行了研究，探讨了钎焊工艺参数对钎料扩散深度以及钎脚高度的影响。
The brazing technology for capillary tube-sheet joints has been studied using a self-made flexible controlling equipment of vacuum electron beam brazing.
DY 2001a型电子束曝光机是作为实用化的小型曝光系统而研制的。
DY2001A Electron Beam Lithography System (EBLS) is developed as a practical miniature EBLS.
为实现电子束曝光机扫描场的线性畸变校正，设计了图形发生器的成像系统，该系统包括硬件和软件两部分。
An imaging system of pattern generator was designed to correct linear distortion of scanning field of ane-beam lithography system, which was composed of both hardware and software.
本发明还涉及用于检测电子束强度的系统。
The invention also refers to a system for sensing an intensity of an electron beam.
在直线感应加速器中，脉冲功率系统的作用是向加速器提供与被加速电子束同步的加速脉冲。
The function of pulse power system of LIA (Linear Induction Accelerator) is generating accelerative pulse and providing it toaccelerate electronic beam synchronously.
最后，这些被加速的电子束陷入地球的辐射带之内，可以对卫星通讯和导航系统产生干扰。
Eventually, the accelerated electrons become trapped in the Earth's radiation belts, where they can interfere with satellite communications and navigation.
为满足纳米级电子束曝光系统的要求，设计了高速图形发生器。
The high speed Patten Generator is designed for nanometer E-beam lithography system.
本文扼要介绍了电子束直写圆片的原理，地形标记的识别，以及电子束曝光系统能识别的圆片标记的制造技术。
In this paper, the principle of electron beam write wafer is discussed briefly distinguish topography mark, and make the technology of wafer mark which is found by the electron beam exposure system.
本文讨论了与计算机控制系统、工作台驱动系统以及电子束偏转系统有关的一些技术问题并提出了这些技术的发展趋势。
Some technical problems concerned with computer control system, stage driving system, beam deflection system are here discussed to point out their development trends.
叙述了用于真空电子束圆形焊缝的自动跟踪系统的设计和试验过程。
This paper present an automatic tracking system applied to vacuum electron beam welding and the process of design and experiment of this system.
利用该系统可对电子束扫描轨迹、扫描频率以及加热区域电子束能量密度的分配进行离线编辑和在线调节。
The EB scanning track, scanning frequency and energy density distribution at heating zone could be programmed off-line and adjusted on-line.
指电子束蒸发器或曝光系统。
并在分析造成真空度不稳定原因的基础上，阐述了的电子束炉真空系统的控制方案及其算法。
The project and arithmetic how to control the vacuum deg ree are introduced by the analysis of the reason why the vacuum deg ree is unstable.
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