该薄膜可采用高真空热蒸发、电子束沉积以及溅射等多种镀膜技术制备。
The thin film can be prepared by a plurality of film plating techniques such as high vacuum thermal evaporation, electron beam deposition and sputtering.
衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。
DOE's fabrication techniques mainly include laser beam or electron beam writing, RIE, ion milling and thin film deposition.
本文研究了多层介质中电子束的能量沉积及深度剂量分布。
Energy deposition in multilayer medium and the depth dose distribution in the layers are.
此外，准直了的快电子束在等离子体中的能量沉积也具有非常重要的实际意义，如快点火方案中点火热斑的形成等。
Furthermore, the energy deposition of collimated fast electrons in dense plasmas is also very important for some applications, such as in fast ignition.
用低能氧等离子体对电子束热蒸发后的沉积氧化锆薄膜进行了后处理。
ZrO_2 films deposited by electron beam evaporation method are treated by oxygen plasma.
本文提出了一种新颖的结合自组装技术和电子束直写曝光以及选择性化学沉积制备图案化薄膜方法。
A novel process combining the self-assembly technique with electron beam lithography and selective chemical deposition was proposed for patterned film preparation.
利用电子束光刻、等离子体增强化学气相沉积、感应耦合等离子体刻蚀来实现跑道型微环谐振器的制备；
The optical part can be done by applying Electron Beam Lithography (EBL), Inductively Coupled Plasma (ICP) etching, and Plasma-enhanced Chemical Vapor Deposition (PECVD).
Ta2O5薄膜采用传统的电子束蒸发方法沉积在BK7基底上。
Ta2O5 films are prepared on BK7 substrates with conventional electron beam evaporation deposition.
得到了散射电子在电子束胶层中背散射与前散射的能量沉积分布图。
The graphs of the forward scattering energy deposition and backscattering energy deposition have been given.
本工作利用透射电镜对电子束增强热丝化学汽相沉积金刚石薄膜的微观结构及生长方式进行了研究。
Microstructure and growth mode of diamond films by electron assisted CVD method have been studied by means of transmission electron microscopy.
综述了热障涂层研究及应用中的几种主要制备技术，包括等离子喷涂、电子束物理气相沉积、离子束辅助沉积、化学气相沉积等。
In this paper, prevailing TBC deposition technologies, including plasma spray, electron beam-physical vapor deposition, ion beam assisted film deposition and chemical vapor deposition, are reviewed.
采用电子束蒸发沉积技术制备了平板偏振膜。
The flat polarizer was prepared by electron beam evaporation and its optical performance was measured by Lambda900 spectrometer.
采用电子束蒸发沉积技术制备了平板偏振膜。
The flat polarizer was prepared by electron beam evaporation and its optical performance was measured by Lambda900 spectrometer.
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