微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。
The microwave electron cyclotron resonance (ECR) plasma is one of the most important means for depositing thin films and microfabrications as well as surface modifications of materials.
本文就是为空间电离层环境模拟器研制的扩散型极低气压、低电子温度和极低密度的紧凑型电子回旋共振等离子体源的研制。
A compact ECR plasma source, the strengths of which are its ultra low electron temperature, its low pressure and its ultra low density, was developed and built for such a simulator.
采用微波电子回旋共振等离子体反应离子刻蚀（E CR-R IE）装置对牦牛毛纤维进行表面改性，从而改善牦牛毛的可纺性。
Yak hairs were treated by the microwave electron cy cl otron resonance plasma reactive ion etching(ECR-RIE) equipment to improve its property of weave.
使用光强标定的发射光谱（AOES）测量了CHF3/C6H6混合气体的微波电子回旋共振（ECR）放电等离子体中基团的分布状态。
The distribution of radicals in CHF3/C6H6 electron cyclotron resonance (ECR) plasma was investigated by an actinometric optical emission spectroscopy (AOES).
在微波电子回旋共振低温等离子体条件下，用二乙二醇二甲醚为试剂对镍钛合金进行表面改性。
A coating on NiTi alloys surfaces was prepared under diethylene glycol dimethyl ether (diglyme) microwave cold-plasma in electron cyclotron resonance conditions.
利用电子回旋共振（ECR）微波等离子体辅助化学气相沉积技术、工作气氛为丙酮，在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜。
Smoothing, dense and uniform nano crystalline diamond like carbon films are prepared by using electron cyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method.
利用电子回旋共振（ECR）微波等离子体辅助化学气相沉积技术、工作气氛为丙酮，在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜。
Smoothing, dense and uniform nano crystalline diamond like carbon films are prepared by using electron cyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method.
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