论文首先讨论了MEMS技术及几种常用的MEMS典型器件和本论文要用到的微机械加工技术。
In this paper, the introduction of the MEMS technology and some useful MEMS devices were widely discussed in the first chapter.
半导体器件上铜层化学机械抛光(CMP)的第一道工序一般需要使用一块硬抛光垫，在磨去阻挡层的工序中要用到软垫。
Typical chemical mechanical polishing (CMP) of copper layers on semiconductor devices involves using a hard pad in the first step and a soft pad for the barrier layer removal step.
具备评估、分析及选择可靠的元器件及材料，并运用到新产品或技术上的能力和经验。
Rich experience on evaluating, analyzing and selecting reliable materials and components for new products and technologies.
目前本设计已应用到光电器件CMOS图象传感器的数据传输并通过了FPGA原型验证。
The design has been used in the data transmission of CMOS image sensor and has passed the FPGA prototype verification correctly.
半导体放电管是新一代抗浪涌保护器件，极间电容是其应用到高频环境下的一个限制因素。
Semiconductor arrester is a new type of surge protection device, which, however, has a large interelectrode capacitance, thus limiting its application in high frequency systems.
各种元器件封装的尺寸，我们经常用到的一些封装，很实用。
Various components Packaging size, we often use the number of packages and practical.
在雷达信号处理中常常要用到延迟时间可调的延迟器件，但目前大多数延迟器件都不能满足要求。
The delay device that the time delay is continuously variable is often needed in radar signal processing, but most delay devices don't satisfy the need.
分析双模铁氧体器件时常用到极化变换矩阵。
Polarization transfer matrices are used for analysing dual-mode ferrite devices frequently.
同时数字化器件不断应用到新型焊接电源的研究中，又为其带来了新的生命力。
At the same time, the digital devices are continuously being applied in researching of new welding machine, which brings new vital energies.
这种方法也可以推广应用到其它MEMS器件的优化问题。
This method may be further extended to the analysis of other MEMS devices.
整个测斜仪从元器件的选用到电源电路的设计都采用了节能设计，使测斜仪的功耗降到最低。
During designing the inclinometer, adopts saving electricity design from choose electronic element to power design, power wastage is least.
因此利用它可实现高性能集成微波毫米波器件，并广泛应用到微波毫米波系统中。
Designing high performance microwave and millimeter wave components with this technology are investigated and make them to be used in microwave and millimeter-wave system.
因此利用它可实现高性能集成微波毫米波器件，并广泛应用到微波毫米波系统中。
Designing high performance microwave and millimeter wave components with this technology are investigated and make them to be used in microwave and millimeter-wave system.
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