分析了基于法布里珀罗腔的微光机电系统可调谐滤波器中，空气腔厚度与峰值波长间的关系。
The relation between the air gap thickness and the peak wavelength in micro-optical electromechanical system (MOEMS) optical tunable filter based on Fabry-Perot etalon is discussed.
分析了基于法布里珀罗腔的微光机电系统可调谐滤波器中，空气腔厚度与峰值波长间的关系。
The relation between the air gap thickness and the peak wavelength in micro-optical electromechanical system (MOEMS) optical tunable filter based on Fabry-Perot etalon is discussed.
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