传感器芯片在玻璃衬底上采用两步mems剥离工艺加工，加工工艺简单可靠。

The sensor was fabricated on ceramic substrate, using two step MEMS lift-off processes.

youdao

传感器芯片在玻璃衬底上采用两步mems剥离工艺加工，加工工艺简单可靠。

The sensor was fabricated on ceramic substrate, using two step MEMS lift-off processes.

youdao