本文介绍了工艺线特种工艺气体系统改造设计方面的一些原则，并详细论述了管路的施工规程。
Some design principles for rebuilding the special gases system of a wafer fab are described. Engineering regulations for rebuilding the tubing system are discussed in detail.
本文介绍了工艺线特种工艺气体系统改造设计方面的一些原则，并详细论述了管路的施工规程。
Some design principles for rebuilding the special gases system of a wafer fab are described. Engineering regulations for rebuilding the tubing system are discussed in detail.
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