为了实现流场壁面剪应力等动态定点分布测量，提出了一种新的柔性热膜传感器阵列结构，并介绍了其制作工艺。
In order to measure dynamically the local temperature or wall shear stress of a flow, a new structure of flexible hot-film sensor array and its fabrication process are proposed.
在对两种分离点在线检测方法比较和分析的基础上，采用了基于热交换原理的微型热膜传感器作为系统的测量元件。
Two methods of online measurement principle were compared, and micro thermal film sensor based on thermal exchange principle was adopted.
建模结果表明，动态非线性模型比线性模型更为准确地描述了热膜(线)式空气质量流量传感器的动态特性。
The modeling results show that the nonlinear dynamic models are more accurate than the linear dynamic models to describe the sensor characteristics.
本课题采用MEMS工艺制作热膜式气体质量流量传感器，主要工作放在敏感头芯片部分的研制。
This task adopt MEMS technics to make Thermal -film air-mass sensor, mostly work is the study and facture of the sense organ of the chip.
本论文主要研究空燃比控制中的两种关键传感器：热膜式空气质量流量传感器和宽带型废气氧传感器的动态性能。
Two kinds of key sensors, hot-film mass air flow (MAF) sensor and universal exhaust oxygen gas sensor, for the AFR control are fully studied in this paper.
报道了一种体积小、热容低、灵敏度高、热响应速度快、不易受强磁场影响的新型碳膜电阻低温传感器。
A new cryogenic carbon thin film resistance sensor which is of small size, low heat capacity, high sensitivity, fast response and small magnetoresistance is reported.
评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。
It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.
热膜式空气质量流量传感器存在动态非线性问题，必须建立动态非线性模型。
The non-linear dynamic model of the hot film MAF sensor must be built because the sensor possesses the nonlinear dynamic characteristics.
作为改善传感器性能的另一个尝试，本文还研究了水热预处理纳米粉对厚膜气敏传感器敏感性能的影响。
For exploiting a new route of improving the gas sensing performance of sensors, the effect of hydrothermal pre-treatment on the gas sensing properties has also been studied.
针对多传感器集成的气象芯片设计中的布局问题，采用有限元方法分析了热风速计工作中产生的热场对气压膜的影响。
Layout design is quite important in multi-sensor integrated weather chips. The influence of the temperature field, induced by thermal anemometer, on pressure sensitive films is analyzed by FEA method.
针对多传感器集成的气象芯片设计中的布局问题，采用有限元方法分析了热风速计工作中产生的热场对气压膜的影响。
Layout design is quite important in multi-sensor integrated weather chips. The influence of the temperature field, induced by thermal anemometer, on pressure sensitive films is analyzed by FEA method.
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