本论文着重阐述了应用于工业领域的微型热式流量传感器的设计与实现。
This paper is focused on the design and implementation of micro thermal gas flow sensors.
建模结果表明，动态非线性模型比线性模型更为准确地描述了热膜(线)式空气质量流量传感器的动态特性。
The modeling results show that the nonlinear dynamic models are more accurate than the linear dynamic models to describe the sensor characteristics.
热式气体质量流量传感器就是其中的一类。
本课题采用MEMS工艺制作热膜式气体质量流量传感器，主要工作放在敏感头芯片部分的研制。
This task adopt MEMS technics to make Thermal -film air-mass sensor, mostly work is the study and facture of the sense organ of the chip.
本论文主要研究空燃比控制中的两种关键传感器：热膜式空气质量流量传感器和宽带型废气氧传感器的动态性能。
Two kinds of key sensors, hot-film mass air flow (MAF) sensor and universal exhaust oxygen gas sensor, for the AFR control are fully studied in this paper.
热式传感器有很大的滞后环节，在数字质量流量控制器中需要对传感器数据进行补偿。
The thermal sensor had a large lag phase, so the data got by the sensor of digital mass flow controller should be compensated in advance.
本课题对微型热式气体流量传感器的稳态传热进行了系统研究。
In this dissertation, the steady heat transfer of the micro thermal airflow sensor is systematically studied.
热膜式空气质量流量传感器存在动态非线性问题，必须建立动态非线性模型。
The non-linear dynamic model of the hot film MAF sensor must be built because the sensor possesses the nonlinear dynamic characteristics.
热膜式空气质量流量传感器存在动态非线性问题，必须建立动态非线性模型。
The non-linear dynamic model of the hot film MAF sensor must be built because the sensor possesses the nonlinear dynamic characteristics.
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