利用双光栅衍射得到的激光莫尔信号进行精密定位具有很高的灵敏度和定位精度。
Precise positioning using moire signal from double grating diffracting has high sensitivity and positioning accuracy.
实验结果表明，基于激光莫尔信号的精密定位装置可获得亚微米级的平面定位精度。
The experimental results show that submicron level plane positioning accuracy can be achieved by the precision positioning device based on laser Moire signal.
实验结果表明，基于激光莫尔信号的精密定位装置可获得亚微米级的平面定位精度。
The experimental results show that submicron level plane positioning accuracy can be achieved by the precision positioning device based on laser Moire signal.
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