提出了用高频光强调制、同源频率合成、软件鉴相的激光相位微距测量方法测量表面微观轮廓高度。
In this paper, the measurement method of high frequency brightness modulation laser phase for mechanic surface microcosmic appearance is given out.
提出了用高频光强调制、同源频率合成、软件鉴相的激光相位微距测量方法测量表面微观轮廓高度。
In this paper, the measurement method of high frequency brightness modulation laser phase for mechanic surface microcosmic appearance is given out.
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