说明了激光外差测量原理。
The testing principle of the laser heterodyne measurement system is explained.
激光外差干涉仪以其测量精度高、抗环境干扰能力强等优点得到了广泛的应用。
Laser heterodyne interferometer has advantages of high measuring precision and anti-environment disturbance ability.
为了补偿激光外差干涉纳米测量中的非线性误差，提出了一种减小非线性误差的一次谐波方法。
To compensate of the nonlinearity error of heterodyne interferometers in nanometer measurement, a method for reducing the first harmonic nonlinearity is proposed.
一种新型的、用于在线测量表面粗糙度的激光外差干涉仪已研制完成。
A novel laser heterodyne interferometer used for on-line measuring surface roughness has been developed.
提出了一种采用双纵模稳频激光器的新型绝对距离测量外差干涉仪。
An absolute distance heterodyne interferometer using a dual longitudinal mode he ne laser is proposed.
光外差磁旋转速度调制光谱技术是一种对离子分子选择性测量的高灵敏激光吸收光谱技术。
Optical heterodyne magnetic rotation enhanced velocity modulation spectroscopy (OH-MR-VMS) is an absorption spectroscopic technique for selective detection of the molecular ions.
随着激光外差干涉测量速度的提高，其存在的原理性误差严重影响测量精度。
With the improvement of measurement velocity in laser heterodyne interference, the theoretical error of laser heterodyne interference seriously restricted the accuracy of measurement.
结合激光外差干涉法和透射式椭偏测量原理，研究了一种快速、高精度测量纳米厚度薄膜光学参数的方法。
Based on the optical heterodyne interferometer and transmission ellipsometry, a new fast measurement technique of nanometer film was presented computational.
结合激光外差干涉术和反射式椭偏测量技术，设计了一种抗干扰能力强，快速、高精度测量纳米厚度薄膜光学参数的方法。
Optical heterodyne interferometry together with reflective ellipsometry, a fast measurement technology with high anti-interference performance was applied to nanometer film.
文本用纵向塞曼双频稳频激光器作光源，提出了一种光学超外差法小平面角的精密测量方法。
This paper discussed an opto-heterodyne technique for small-plane-angle measurement with a frequency-stabilized longitudinal Zeeman laser as the light source.
文本用纵向塞曼双频稳频激光器作光源，提出了一种光学超外差法小平面角的精密测量方法。
This paper discussed an opto-heterodyne technique for small-plane-angle measurement with a frequency-stabilized longitudinal Zeeman laser as the light source.
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