本文研究了辉光放电离子轰击钎焊时阴极溅射现象对工件表面的净化作用。
The surface cleaning action, caused by the cathode sputtering phenomenon in ion bombardment brazing in glow discharge is investigated in this paper.
真空溅射镀膜设备中加热装置在镀膜时常出现打火现象，本文采用金属屏蔽和外壳接地的方法很好地解决了这一问题。
The heating equipment of vacuum sputter coating apparatus always sparks during sputtering, Using metal-screening and surface earth can solve this problem well.
溅射后合金样品近表面组成的改变，是一种有趣的实验现象。
The surface layer compositional change of sample under sputtering is an interesting one of many sputtering phenomena.
溅射后合金样品近表面组成的改变，是一种有趣的实验现象。
The surface layer compositional change of sample under sputtering is an interesting one of many sputtering phenomena.
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