针对微加工工艺过程造成的残余应力，文中提出了喇曼在线测量方法，并对最常用的三种微加工工艺：淀积、腐蚀或刻蚀及键合进行了喇曼在线测量。
This paper puts forward an online measuring method for measuring the stress in silicon samples prepared with three common micromachining processes: deposition, etching, and bonding.
针对微加工工艺过程造成的残余应力，文中提出了喇曼在线测量方法，并对最常用的三种微加工工艺：淀积、腐蚀或刻蚀及键合进行了喇曼在线测量。
This paper puts forward an online measuring method for measuring the stress in silicon samples prepared with three common micromachining processes: deposition, etching, and bonding.
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