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提出一种浮雕矩形光栅刻槽深度的高精度衍射测量方法。
A new method of high accuracy to measure the groove depth of rectangular relief gratings by laser diffraction is proposed.
youdao
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提出一种浮雕矩形光栅刻槽深度的高精度衍射测量方法。
A new method of high accuracy to measure the groove depth of rectangular relief gratings by laser diffraction is proposed.
youdao