所以研究如何提高激光测微头的测量精度和速度有很高的实用价值。
So to study on improving the laser triangular measuring device's measuring precision and speed is of great practical value.
最后列出采用VHDL制作CCD工作时序的方法，基于这种方法把它用于光学三角法的激光测微头。
At last, the method to produce the working signal of CCD in detail with using VHDL is listed. Based on the method, it is used in laser device of optic triangle measuring.
为了提高MEMS微接触式测头的性能，系统开展了测头的结构设计和参数优化。
To improve the performance of MEMS micro tactile probe, the structure design and parameter optimization of probe are developed.
随着测量速度的提高，测微仪测头的动态性能已经成为影响测量精度的重要因素。
With measurement speed increasing, the dynamic performance of the probe becomes an important factor which influences measurement precision.
试验结果表明：在对电感测微仪测头的设计中，合理增加刚度和预压量、减少活动部分的质量可以提高测头的动态响应性能。
The test results indicate that increasing reasonably the probe's stiffness and pre-compression capacity and reducing the mass of movable part may enhance its dynamic response performance.
该装置以组合量块为标准，采用可换向的单测头和成本较低的电感测微仪进行定位测量。
The new measurement system of thermal deformation adopts combined gauges as standard length, single switchable measuring head and inductance micrometers to carry on relative measurement.
针对微小结构几何量测量的需求，通过集成MEMS微触觉测头和纳米测量机构建了高精度的测量系统。
According to dimension measurement requirement of micro structure, a measurement system combined by MEMS micro tactile probe and nanomeasuring machine is constructed.
超微针是各种SPM进行原子量级的测试及加工的测头和基础工具。
Microtip is the probe and the elementary tool for SPM to undertake measurement and fabrication on the atomic-scale.
搭建了高精度三维微位移测试平台，对测头的测量范围、线性、位移误差进行了实验验证。
A high precision three-dimensional micro displacement test platform was set, and the measuring range, linearity and displacement error of the probe were tested and verified by experiments.
搭建了高精度三维微位移测试平台，对测头的测量范围、线性、位移误差进行了实验验证。
A high precision three-dimensional micro displacement test platform was set, and the measuring range, linearity and displacement error of the probe were tested and verified by experiments.
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