考察了磷酸铝颗粒度、氨流量和氮化温度对氮化磷酸铝制备的影响。
The effect of the size of alumionphosphate precursor, ammonia flow and nitridation temperature on preparation of AlPON were investigated.
考察了磷酸铝颗粒度、氨流量和氮化温度对氮化磷酸铝制备的影响。
The effect of the size of alumionphosphate precursor, ammonia flow and nitridation temperature on preparation of AlPON were investigated.
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