在某一特定的温度处，氧化钒薄膜发生金属-半导体相的转变。
At a critical temperature, vanadium oxide films undergo phase transition between metal phase to semi-conducting phase.
本文以高纯金属钒作为靶材，采用磁控溅射工艺制备氧化钒薄膜。
In this paper, several thin films samples of vanadium oxide were got by high-frequency Magnetron sputter with pure metal vanadium as sputter source.
掺杂能明显改变二氧化钒薄膜的相变温度，影响其电学和光学性质。
Phase transition temperature (Tc) of VO2 thin films was changed obviously by doping methods and then the electrical and optical properties were influenced.
通过改变氧分压强、溅射功率、沉积时间和衬底材料来获得不同相组成的氧化钒薄膜。
The different phase composition of the films has been obtained by changing oxygen partial pressure, sputtering powers, deposition times and materials of substrate.
对目前在非致冷微测辐射热计研制中得到成功应用的氧化钒薄膜的特性、制备及表征技术进行综述。
The properties, preparation and characteristics of vanadium oxide thin film, which has been successfully used in un cooled micro bolometer fabrication, are reviewed.
氧化钒薄膜作为非制冷红外探测器的热敏材料，要求具有高的电阻温度系数(TCR)与合适的电阻值，以满足器件的应用。
As the detecting material of uncooled infrared detectors, vanadium oxide (VOX) thin films need high temperature coefficient of resistance (TCR) and suitable film resistance for using of the device.
因此，形成价态更高的钒氧化物薄膜。
Therefore, formation of high valance vanadium oxide films was obtained.
并在其表面沉积了氧化钒热敏薄膜，研究了多孔硅样品的热绝缘性能对氧化钒热敏薄膜阻温特性的影响。
The influence of the thermal isolation of the PS on resistance's sensitivity of VOx film was investigated.
通过查阅国内外文献，从不同角度对二氧化钒纳米粉体和薄膜的各种制备方法进行综述，并报道了其相关应用。
The preparation methods of vanadium dioxide nanopowders and thin film were reviewed, The application of VO_2 are given. There will be a good developing prospect in VO_2 nanopowders and thin film.
通过查阅国内外文献，从不同角度对二氧化钒纳米粉体和薄膜的各种制备方法进行综述，并报道了其相关应用。
The preparation methods of vanadium dioxide nanopowders and thin film were reviewed, The application of VO_2 are given. There will be a good developing prospect in VO_2 nanopowders and thin film.
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