针对高温氧化扩散炉设备工艺温度需求，提出了高性能多段炉温控制系统与整定技术。
An improved technique in multivariable temperature control system was offered for high-temperature diffusion furnaces.
针对高温氧化扩散炉设备工艺温度需求，提出了高性能多段炉温控制系统与整定技术。
An improved technique in multivariable temperature control system was offered for high-temperature diffusion furnaces.
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