并在其表面沉积了氧化钒热敏薄膜，研究了多孔硅样品的热绝缘性能对氧化钒热敏薄膜阻温特性的影响。
The influence of the thermal isolation of the PS on resistance's sensitivity of VOx film was investigated.
并在其表面沉积了氧化钒热敏薄膜，研究了多孔硅样品的热绝缘性能对氧化钒热敏薄膜阻温特性的影响。
The influence of the thermal isolation of the PS on resistance's sensitivity of VOx film was investigated.
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