简述了顺磁式氧分析器的计量检定方法及过程。
The method and the course of verification of paramagnetic oxygen analyzer was briefly described.
简述电化学电极气体氧分析器的计量检定方法及过程。
The method and the course of verification of electrochemical electrode gas oxygen analyzer was briefly described.
电化学电极气体氧分析器计量标准的扩展不确定度小于5%。
The uncertainty of measurement for the standard of measurement of electrochemical electrode gas oxygen analyzer is less than 5%.
采用无质量分析器的离子注入机，以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
An implanter without ion mass analyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
采用无质量分析器的离子注入机，以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
An implanter without ion mass analyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
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