计算结果表明，随着溅射时氧分压的增加，薄膜的结晶活化能增加，而相应的非晶态与晶态之间的焓差则呈现出相反的变化趋势。
The results showed that the activation energy increased with the increase of oxygen partial pressure, while the enthalpy difference between the as-deposited and the crystalline states decreased.
计算结果表明，随着溅射时氧分压的增加，薄膜的结晶活化能增加，而相应的非晶态与晶态之间的焓差则呈现出相反的变化趋势。
The results showed that the activation energy increased with the increase of oxygen partial pressure, while the enthalpy difference between the as-deposited and the crystalline states decreased.
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