超精密气浮工件台系统是当前主流光刻机中的核心子系统，要求具有纳米级的重复定位精度和同步运动精度。
Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level.
用一个由恒微测力并经精确校准的气浮LVDT 传感器和相应软硬件组成的测量系统对非球面加工工件表面进行在机测量。
The On line measurement of aspheric workpiece surface is made by using a precise calibrated, low force, air bearing LVDT and the measuring system composed of corresponding software and hardware.
基于气浮轴承支承技术，设计了硬支承立式双面动平衡机，建立了相应的数学模型。
A vertical hard bearing two-plane dynamic balancing machine, based on gas bearing technique, was designed, and corresponding mathematic model was established.
基于气浮轴承支承技术，设计了硬支承立式双面动平衡机，建立了相应的数学模型。
A vertical hard bearing two-plane dynamic balancing machine, based on gas bearing technique, was designed, and corresponding mathematic model was established.
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